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Precise X-Y-Z Readout with a micro-Magnetometer Inverted-pyramid Design

Project description

New, compact device to measure magnetic fields in all directions

Magnetometers are critical for detecting magnetic fields in applications such as navigation, biomedical devices and satellites. Current chip-scale magnetometers can only detect 1D fields, struggle with accuracy in certain directions and fail to work in extreme temperatures. With the support of the Marie Skłodowska-Curie Actions programme, the PYRAMID project plans to develop a compact 3D magnetometer that is three to 10 times more accurate and uses just 10 % of the space of existing solutions. By leveraging advanced micromachining techniques and integrating GaN and graphene, PYRAMID will create a single-chip solution for precise 3D navigation, even in extreme environments. The proposed solution will offer new possibilities for biomedical implants, power systems and nanosatellites.

Objective

"Chip-scale magnetometers come in several flavors, the most common being silicon Hall-effect plates that integrate easily with electronics. However, these devices only detect 1D fields, are asymmetric between X-Y and Z directions, and cannot work in extreme temperatures. My goal is to leverage my expertise in micromachining and wide-bandgap semiconductor Hall-plates to realize magnetometers with a unique ""3D"" microstructure that uses 10% of the space of existing ""3x1D"" sensors, and is 3-10x more accurate. This enables new products for 3D navigation in autonomous microsystems such as biomedical implants, power monitoring, and nanosatellites.

This proposal will involve the development of the inverted pyramid device through crystallographic etching of <100> CMOS silicon to expose the <111> crystal plane at 54.7°. This enables higher angular accuracy and avoids fabrication misalignment or packaging errors. The <111> also supports direct GaN and other 3D Material integration with CMOS chips. In parallel, the host group, the Electronics Instrumentation(EI) laboratory at TU Delft, will develop the CMOS integrated circuit for front-end amplification and switching scheme of the sensor to detect all three components of the field from a singular device. The EI lab is top-ranked in circuits design and complements my sensor development activities seamlessly.

The final year of the project will focus on testing these chips packaged together and development of a integrated single chip with both sensor and circuit to reveal improved performance with the use of graphene as the device layer. This project will open up future work with (ultra) wide-bandgap material integration using GaN and/or Diamond to enable extreme-environment navigation sensors with exotic applications in high temperature environments.

The project will improve my career prospects as a tenure-track professor with training in circuits, teaching and tenure-track professional development at TU Delft."

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Programme(s)

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Topic(s)

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Funding Scheme

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HORIZON-TMA-MSCA-PF-EF - HORIZON TMA MSCA Postdoctoral Fellowships - European Fellowships

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Call for proposal

Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.

(opens in new window) HORIZON-MSCA-2022-PF-01

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Coordinator

TECHNISCHE UNIVERSITEIT DELFT
Net EU contribution

Net EU financial contribution. The sum of money that the participant receives, deducted by the EU contribution to its linked third party. It considers the distribution of the EU financial contribution between direct beneficiaries of the project and other types of participants, like third-party participants.

€ 203 464,32
Total cost

The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.

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