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Vibrating Membrane Gauge for Wide-Range Pressure Measurement

Project description

An alternative ionisation gauge to measure residual gas pressure

Vacuum conditions are used in various industrial and scientific processes to enhance cleanliness and control. Monitoring the vacuum level is important to maintaining consistent process outcomes. Ionisation gauges are regarded as the most advanced equipment for measuring residual gas pressure at high and ultrahigh vacuum levels. The ERC-funded VIMEG project seeks to develop an alternative pressure gauge that utilises a nanomechanical membrane resonator with ultralow intrinsic damping to measure gas friction. This innovative approach holds the potential to deliver more compact, durable, and accurate gauges that can cover a broader pressure range compared to conventional ionisation gauges.

Objective

Numerous industrial and scientific processes are conducted under vacuum conditions for improved cleanliness and control. Monitoring the vacuum level is crucial to ensure consistent process results. Ionization gauges represent the state-of-the-art for measuring residual gas pressure at high and ultrahigh vacuum levels. Here we propose to establish an alternative pressure gauge based on measuring the gas friction experienced by a nanomechanical membrane resonator with ultralow intrinsic damping. This approach promises more compact, durable, and accurate gauges that cover a wider pressure range than conventional ionization gauges.

Programme(s)

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Topic(s)

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Funding Scheme

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HORIZON-ERC-POC - HORIZON ERC Proof of Concept Grants

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Call for proposal

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(opens in new window) ERC-2023-POC

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Host institution

KOBENHAVNS UNIVERSITET
Net EU contribution

Net EU financial contribution. The sum of money that the participant receives, deducted by the EU contribution to its linked third party. It considers the distribution of the EU financial contribution between direct beneficiaries of the project and other types of participants, like third-party participants.

€ 150 000,00
Address
NORREGADE 10
1165 KOBENHAVN
Denmark

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Region
Danmark Hovedstaden Byen København
Activity type
Higher or Secondary Education Establishments
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Total cost

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Beneficiaries (1)

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