Objective
Excillum is an award-winning pioneer in the field of high-end X-ray sources. Hans Hertz and Oscar Hemberg of the Royal Institute of Technology (KTH) in Stockholm, founded Excillum in 2008. Excillum designs, develops and manufactures a high brightness microfocus X-ray source based on Hertz and Hemburg’s invention. This unique patented technology, MetalJet, is the most fundamental advance in X-ray tube technology since the rotating anode was introduced in 1929, as it can reach previously unprecedented X-ray intensities (up to 10x brighter than conventional X-ray tubes).
As an independent X-ray tube supplier, we aim to sell our components to original equipment manufacturers (OEMs) across many sectors. We are following a commercial roadmap to enter sectors where our innovation can add the most value. To date we have sold >50 units (400k€/unit) in the X-ray analytical sector.
We are now targeting the semiconductor sector, specifically metrology (measuring and characterizing tiny structures and materials). The need for metrology in the sector is crucial and directly affects yield, and thus costs. With the 3D nanoscale components used in chips today, current metrology instruments such as optical metrology - (relatively) low resolution, high throughput - and scanning electron microscopes - high resolution, low throughput - are struggling to remain viable.
Industry experts point to CD-SAXS (Critical Dimension Small Angle X-ray Scattering) as the next-generation metrology solution capable of meeting the demands of the sector. However, CD-SAXS is still at the R&D stage because of a lack of a sufficiently bright X-ray source. MetalJet is the only X-ray source that can take CD-SAXS out of the lab. This project will verify our commercial hypotheses and define the activities and resources needed to adapt MetalJet for integration into metrology instruments. We have received expressions of interest from market-leading sector OEMs, like Bruker, and chipmaker Intel, among others.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
- natural sciences physical sciences optics microscopy electron microscopy
- natural sciences physical sciences electromagnetism and electronics semiconductivity
- engineering and technology nanotechnology nanoelectronics
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Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
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H2020-EU.2.1.2. - INDUSTRIAL LEADERSHIP - Leadership in enabling and industrial technologies – Nanotechnologies
MAIN PROGRAMME
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H2020-EU.2.1.5. - INDUSTRIAL LEADERSHIP - Leadership in enabling and industrial technologies - Advanced manufacturing and processing
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H2020-EU.2.1.3. - INDUSTRIAL LEADERSHIP - Leadership in enabling and industrial technologies - Advanced materials
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H2020-EU.2.3.1. - Mainstreaming SME support, especially through a dedicated instrument
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Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
SME-1 - SME instrument phase 1
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Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
(opens in new window) H2020-SMEInst-2016-2017
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Net EU financial contribution. The sum of money that the participant receives, deducted by the EU contribution to its linked third party. It considers the distribution of the EU financial contribution between direct beneficiaries of the project and other types of participants, like third-party participants.
164 40 Kista
Sweden
The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.