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FP6

Final Report - NANOPLASMA (Plasma Etching for desired nano-Feature shape and nano-texture: An Advanced Reactor and Simulation Software for Feedback-Loop Plasma Control)

Funded under: FP6-NMP

Abstract

This is the final report for the 'Plasma etching for desired nano-feature shape and nano-texture: an advanced reactor and simulation software for feedback-loop plasma control' (Nanoplasma) project. Through plasma and surface modelling software, plasma diagnostics and improved plasma etch tool design, the project aimed to improve the reproducibility and control of some of the more difficult etching processes at the nanoscale. The report comments that the academic output should be noted for its productivity, especially from Demokritos.

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Related information

Record Number: 10889 / Last updated on: 2011-04-14
Category: PROJ