Community Research and Development Information Service - CORDIS

FP7

Final Report - PIEZOVOLUME (High volume piezoelectric thin film production process for microsystems)

Project ID: 229196
Funded under: FP7-NMP

Abstract

This is the final report for the PIEZOVOLUME project which received funding under the European Commission (EC)'s Seventh Framework Programme (FP7). The main goal of PIEZOVOLUME was to develop an integrated high-volume production process for piezoelectric microsystems. The developed platform covers the complete microfabrication process chain and the project developed the tools and procedures within the three most significant bottlenecks within hardware and software to realise high volume fabrication of piezo microelectromechanical systems (piezoMEMS).

The report includes an executive summary providing an overview of the project. It then presents the main objectives which are classified into five work packages and goes on with the work performed and the main achievements. It closes with the results' potential impact and the dissemination activities.

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Related information

Record Number: 15334 / Last updated on: 2013-06-04
Category: PROJ