Community Research and Development Information Service - CORDIS

Abstract

A low energy, high current electron gun has been developed in an attempt to combine plasma processing with polarisation of thick dielectric substrates by fast electron injection. The new electron gun produces substrate electron current densities of 1 mA/cm2 and enables well controlled biasing of dielectric substrates whatever their thickness or shape. Substantial progress has been accomplished in understanding the nucleation and growth processes. New light was shed on the role of energy density deposited in elastic collision cascades and its impact on the nucleation dynamics. Physical mechanisms responsible of carbon and hydrogen incorporation were analysed in detail. Interaction between external and intrinsic stress fields and their impact on the diamond-like carbon (DLC) microstructure, hybridisation and optoelectronic properties has been demonstrated. Stress mediated nucleation was shown to lead to formation of auto-correlated nano-structured DLC films.

Download application/pdf (765781)

Follow us on: RSS Facebook Twitter YouTube Managed by the EU Publications Office Top