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Soft and hard carbon-hydrogen films were deposited in a rf glow discharge. Their stopping powers were deduced from depth-profile analysis by means of proton-enhanced cross-section scattering at around 1.5 MeV and 4He(+) elastic-recoil detection at 2.6MeV. In the case of soft films, ion-induced hydrogen depletion allowed study of the dependence of the stopping power on hydrogen concentration. The presence of hydrogen increases the stopping power of the film by a factor of up to 2 compared to the predicted value for pure carbon. Moreover, Bragg's rule underestimates the total stopping considerably. However, good agreement is obtained with a recent theoretical model by Sabin et al. which takes into account the different C-C and C-H chemical bonds.

Additional information

Authors: BOUTARD D, Max-Planck-Institut fur Plasmaphysik, Garching bei Munchen (DE)
Bibliographic Reference: Article: Physical Review B, Vol.38 (1988), No.5, pp.2988-2994
Record Number: 198910017 / Last updated on: 1994-12-01
Original language: en
Available languages: en
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