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Abstract

Simple and economic production of plasma can be achieved over a wide range of plasma parameters by exciting electrodeless, slotted-line radiating structures with microwave power. These plasma sources, which originate from fusion research, are suitable for applications in both low-temperature and thermal plasma chemistry.

Additional information

Authors: LISITANO G, Max-Planck Institut fur Plasmaphysik, Garching bei Munchen (DE)
Bibliographic Reference: Report: IPP III/145 en(1989)
Availability: Available from Max-Planck-Institut fur Plasmaphysik, 8046 Garching bei Munchen (DE)
Record Number: 198910999 / Last updated on: 1994-12-05
Category: PUBLICATION
Original language: en
Available languages: en
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