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Nickel and carbon targets were bombarded perpendicularly with H+, H(2)+, H(3)+, D+, D(2)+ and D(3)+ ions at energies ranging from 2 keV to 20 eV/nucleon. The energy distributions of backscattered neutral atoms were measured at a scattering angle of 135 with a time of flight (TOF) technique. The energy distributions obtained from molecular ion bombardment are broader than those obtained from H+ or D+. Assuming a cosine angular distribution, the particle reflection coefficients are determined from the measured energy distributions. The comparison of the experimental results with computer simulations shows that good agreement is obtained when hydrogen implantation is taken into account.

Additional information

Authors: ARATARI R, Max-Planck-Institut für Plasmaphysik, D-8046 Garching bei München (DE);ECKSTEIN W, Max-Planck-Institut für Plasmaphysik, D-8046 Garching bei München (DE)
Bibliographic Reference: Article: Nuclear Instruments and Methods in Physics, Vol. B42 (1989), pp. 11-18
Record Number: 198911051 / Last updated on: 1994-12-01
Original language: en
Available languages: en