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Authors: HEILAND W, EURATOM-IPP, D;TAGLAUER E EURATOM-IPP, D, EURATOM-IPP, D
Bibliographic Reference: J. VAC. SCI. TECHNOL., VOL. 12, PP 352-353, 1975
Record Number: 1989113058600 / Last updated on: 1987-01-01
Category: PUBLICATION
Available languages: en