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Authors: ENGLERT W, EURATOM-IPP GARCHING (D);HEILAND W, EURATOM-IPP GARCHING (D);TAGLAUER E EURATOM-IPP GARCHING (D), EURATOM-IPP GARCHING (D)
Bibliographic Reference: JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY VOL. 15 (1978) NO. 2, PP. 419-422
Record Number: 1989116080100 / Last updated on: 1987-01-01
Category: PUBLICATION
Available languages: en