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Abstract

A finite difference computer program is described which has been written to treat diffusion and trapping problems in ion implantation and plasma - wall interaction applications. The one-dimensional code employs a non-equidistant, exponentially varying mesh grid, the numerical approximation on which is only precise to order DELTA-x. Examples, however, show this inaccuracy to be negligible for practical problems. Representative results for deuteron implantations into stainless steel are compared to analytical predictions. The role of simplified source distributions is discussed.

Additional information

Authors: MOELLER W MAX-PLANCK-INSTITUT FUER PLASMAPHYSIK, GARCHING BEI MUENCHEN (GERMANY), MAX-PLANCK-INSTITUT FUER PLASMAPHYSIK, GARCHING BEI MUENCHEN (GERMANY)
Bibliographic Reference: WRITE TO MAX-PLANCK-INSTITUT FUER PLASMAPHYSIK, 8046 GARCHING BEI MUENCHEN (GERMANY), MENTIONING REPORT IPP 9/44, 1983
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