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Abstract

Trapping and particle reflection coefficients for 0.4-10KeVD on graphite have been measured for angles of incidence 0<=varies as<=85 degrees by determining the areal density of implanted D as a function of the implanted fluence. The experimental data are compared to computer calculation with the TRIM-program. The agreement between measurement and calculation is good.

Additional information

Authors: CHEN C K, MAX-PLANCK-INSTITUT FUER PLASMAPHYSIK, GARCHING BEI MUENCHEN (GERMANY);SCHERZER B M U, MAX-PLANCK-INSTITUT FUER PLASMAPHYSIK, GARCHING BEI MUENCHEN (GERMANY);ECKSTEIN W MAX-PLANCK-INSTITUT FUER PLASMAPHYSIK, GARCHING BEI MUENCHEN (GERMANY), MAX-PLANCK-INSTITUT FUER PLASMAPHYSIK, GARCHING BEI MUENCHEN (GERMANY)
Bibliographic Reference: APPLIED PHYSICS A, VOL. 33 (1984), PP. 265-268
Record Number: 1989122086700 / Last updated on: 1987-01-01
Category: PUBLICATION
Available languages: en