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Abstract

Several types of ion guns are suitable for scanning ion microscopy (SIM) and high resolution secondary ion mass spectrometry (SIMS). In order to purify the beam produced by the gun, mass separation witha Wien filter (ExB separator) is most appropriate. The microprobe can be formed by imaging the source or a physical aperture, strongly demagnified, (Koehler illumination) to the sample. The minimum spot size is limited by lens aberrations. In view of the destructive nature of SIM(S), effective collection of the charged secondary particles is mandatory.

Additional information

Authors: LIEBL H MAX-PLANCK-INSTITUT FUER PLASMAPHYSIK, GARCHING BEI MUENCHEN (GERMANY), MAX-PLANCK-INSTITUT FUER PLASMAPHYSIK, GARCHING BEI MUENCHEN (GERMANY)
Bibliographic Reference: SCANNING ELECTRON MICROSCOPY (1984), PP. 51-528
Record Number: 1989123016300 / Last updated on: 1987-01-01
Category: PUBLICATION
Available languages: en