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Abstract

Self-sputtering and reflection are investigated with the Monte Carlo program TRIMSP. The results include particle and energy reflection coefficients, sputtering yields and sputtered energy versus incident angle and energy. Angular and energy distributions of reflected and sputtered particles are also given. Reflection and sputtering values are compared to show their contributions to self-sputtering. A comparison of calculated sputtering yields and sputtering efficiencies (sputtered energy) with experimental data is carried out. The systems investigated are mainly the bombardment of C, Ni, and W with self-ions.

Additional information

Authors: ECKSTEIN W MAX-PLANCK-INSTITUT FUER PLASMAPHYSIK, GARCHING BEI MUENCHEN (GERMANY), MAX-PLANCK-INSTITUT FUER PLASMAPHYSIK, GARCHING BEI MUENCHEN (GERMANY)
Bibliographic Reference: WRITE TO MAX-PLANCK-INSTITUT FUER PLASMAPHYSIK, 8046 GARCHING BEI MUENCHEN (GERMANY), MENTIONING REPORT IPP 9/54, 1985
Record Number: 1989124061400 / Last updated on: 1987-01-01
Category: PUBLICATION
Available languages: en