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Abstract

Multiphoton excitation of SiH-4 has been investigated with pulsed line tunable and continuously tunable Co-2 lasers in order to clarify dissociation dynamics in laser induced hydrogenated silicon deposition.

Additional information

Authors: FANTONI R, ENEA, CENTRO RICERCHE ENERGIA FRASCATI (ITALY);GIARDINI GUIDONI A, ENEA, CENTRO RICERCHE ENERGIA FRASCATI (ITALY);SNELS M ENEA, CENTRO RICERCHE ENERGIA FRASCATI (ITALY), ENEA, CENTRO RICERCHE ENERGIA FRASCATI (ITALY)
Bibliographic Reference: QUARTO CONGRESSO NAZIONALE DEL G.N.E.Q.P., CAPRI (ITALY), MAY 21-24, 1984 PP. 39-42 WRITE TO ENEA - CENTRO RICERCHE ENERGIA FRASCATI, SERVIZIO STUDI E DOCUMENTAZIONE C.P. 65 - 00044 FRASCATI, ROMA (ITALY), MENTIONING REPORT RT/FUS/84/5, 1984
Record Number: 1989126038301 / Last updated on: 1989-01-01
Category: PUBLICATION
Available languages: it