QUANTITATIVE ANALYSIS OF HE IN SOLIDS BY SPUTTERED MEUTRAL MASS SPECTROMETRY
Sputtered neutral mass spectrometry is shown to be a very sensitive, depth-differential technique for the analysis of helium in solids. Detection limits in nickel are some 10 ppm for near-surface He distributions and can be lowered to a few ppm if extreme depth resolution is not important. Range parameters of 4-He in Ni and Si agree very well with theoretical data. Quantitative evaluation of He concentrations with an accuracy of 4% can be done by producing an internal standard via in situ ion implantation.
Bibliographic Reference: J. VAC. SCI. TECHNOL. VOL. A5 (1987), NO. 4, PP. 1194-1197
Record Number: 1989126059300 / Last updated on: 1989-03-01
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