BERYLLIUM SELF-SPUTTERING - AN INTERPOLATION OF DATA FOR D, HE, NE AND AR
The available data for the sputtering yield of Be by D, He, Ne and Ar are collected and critically discussed in terms of surface oxidation and surface roughness. For light ions, surface oxidation at room temperature during bombardment prevents cleaning and values equivalent to BeO are obtained. At temperatures above 900 K Be diffusion and segregation leads to clean surface conditions. At temperatures above 1050 K the weight loss due to evaporation is larger than that due to deuterium sputtering. These data can be reproduced by TRIM-SP computer simulations within a factor of about 2. At normal incidence measured data are higher, at grazing incidence lower, than calculated. This can be attributed to the large surface roughness of the sintered Be samples. Within this uncertainty Be self-sputtering yields and reflection coefficients can be calculated. For all energies the yield remains below unity at normal incidence. However, a strong increase with angle of incidence leads to yields larger than unity at 45 and energies above 100 eV.
Bibliographic Reference: ARTICLE: JOURNAL OF NUCLEAR MATERIALS, VOL. 165 (1989) PP. 199-204
Record Number: 1989128050000 / Last updated on: 1990-11-09
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