Unity yield conditions for sputtering of graphite by carbon ions
Selfsputtering yields for graphite were investigated as a function of ion energy, target temperature and angle of incidence. While the yield for normal incidence at room temperature never exceeds unity, both enhanced temperature and grazing angle of incidence can lead to a selfsputtering larger than one. Theoretical predictions of 100% ion reflection at angles of incidence above 85 cannot be observed for energies smaller than 300 eV. The data are interpolated to construct regions of selfsputtering larger than unity in the energy versus angle of incidence space for temperatures up to 1900 K.
Bibliographic Reference: Article: Journal of Nuclear Materials, Vol. 165 (1989) pp. 193-198
Record Number: 199010591 / Last updated on: 1994-12-01
Original language: en
Available languages: en