Effects of crystallinity upon the quantification of Auger Electron Spectroscopy
Auger Electron Spectroscopy (AES) is one of the standard analytical techniques for characterising surfaces and interfaces. Although the influences of crystalline effects on the intensity of Auger peaks has long been recognised, they have been generally ignored in practical applications of AES. A collaborative programme involving five European laboratories was sponsored by the Community Bureau of Reference in order to explore the magnitude of crystalline effects and to assess their significance to quantitative AES. Experimental measurements showed that intensity ratios between Auger peaks from different elements in a spectrum were strongly dependent on crystal orientation. Theoretical calculations explained the experimental measurements qualitatively and showed the relative importance of the various mechanisms involved. There is no simple way to correct crystalline effects in quantitative AES. In the analysis of a substrate the Auger intensity from one element may vary quite differently from the others, and it appears that a strategy will have to be developed to get reliable quantitative information for each particular case.
Bibliographic Reference: EUR 12735 EN (1990) 43 pp., MF, ECU 4, blow-up copy ECU 6.25
Record Number: 199010985 / Last updated on: 1994-12-01
Original language: en
Available languages: en