Community Research and Development Information Service - CORDIS

Abstract

A compact UHV-compatible sample manipulator with three rotational and three translational degrees of freedom is described. The manipulator head has less than 25 mm radius and is completely manufactured from nonmagnetic materials. With liquid nitrogen as a coolant temperatures of 100 K can be achieved.

Additional information

Authors: DÜRR H, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);FAUSTER TH, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);SCHNEIDER R, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);DURR H, Max-Planck-Institut fur Plasmaphysik, Garching bei Munchen (DE)
Bibliographic Reference: Article: Journal on Vacuum Science and Technology, Vol. A8 (1990) No. 1, pp. 145-146
Record Number: 199011256 / Last updated on: 1994-12-01
Category: PUBLICATION
Original language: en
Available languages: en
Follow us on: RSS Facebook Twitter YouTube Managed by the EU Publications Office Top