A compact three-axis cryogenic ultrahigh vacuum manipulator
A compact UHV-compatible sample manipulator with three rotational and three translational degrees of freedom is described. The manipulator head has less than 25 mm radius and is completely manufactured from nonmagnetic materials. With liquid nitrogen as a coolant temperatures of 100 K can be achieved.
Bibliographic Reference: Article: Journal on Vacuum Science and Technology, Vol. A8 (1990) No. 1, pp. 145-146
Record Number: 199011256 / Last updated on: 1994-12-01
Original language: en
Available languages: en