Thin reference layers available for calibration purposes in ion beam analysis
Evaporated standard layers of metals deposited on light substrates (mainly vitreous carbon) can be employed to reduce some of the key uncertainties in ion beam analysis. Their preparation and the determination of their accurate areal density by a unique in-vacuum weighing procedure are described. Examples of the application of such reference layers in Rutherford backscattering spectrometry (RBS) and particle-induced X-ray emission (PIXE) analysis are presented and are shown to improve the analytical accuracy of these techniques.
Bibliographic Reference: Paper presented: 1st European Conference on Accelerators in Applied Research and Technology, Frankfurt (DE), Sept. 5-9, 1989
Availability: Available from (1) as Paper EN 34879 ORA Also published in Nuclear Instruments and Methods in Physics Research B50 (1990) pp. 172-176
Record Number: 199011748 / Last updated on: 1994-12-02
Original language: en
Available languages: en