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Abstract

The purpose of the present experiment is to demonstrate that a feature the size of 0.3 microns can be obtained by using a simple 1:1 proximity printing technique with transition radiation as a source of soft X-rays. This paper presents the results of some test exposures carried out at the end of a series of measurements of X-ray transition radiation at the Saclay linear accelerator. The experimental parameters are not optimised for maximum intensity of the X-ray source.

Additional information

Authors: GOEDTKINDT P, JRC Geel (BE);SALOMÉ J-M, JRC Geel (BE);ARTRU X, IPN-Lyon, Villeurbanne (FR);DHEZ P, LURE and LSAI, Orsay (FR);MAENE N, SCK/CEN, Mol (BE);POORTMANS F, SCK/CEN, Mol (BE);WARTSKI L, Université Paris-Sud, IEF Laboratoire associé CNRS, Orsay (FR)
Bibliographic Reference: Paper presented: International Conference on Microlithography, Louvain (BE), Sept. 18-20, 1990
Availability: Available from (1) as Paper EN 35563 ORA
Record Number: 199011784 / Last updated on: 1994-12-02
Category: PUBLICATION
Original language: en
Available languages: en