Evaluation of the relative stability of scanning electron microscope calibration spheres in vacuum, and during irradiation with an electron beam
The stability of two sizes of BCR latex calibration spheres, with respect to exposure to both electron beam irradiation and to vacuum in a scanning electron microscope, has been measured over a range of incident beam currents, for periods up to 8 hours. The results show that whilst all spheres exposed to an electron beam will shrink, they are unaffected by vacuum conditions. The effects of carbon build-up on the surface have been characterised and subtracted from the measured sizes, enabling the true shrinkage rate of the spheres to be determined. The relationship between the rate of shrinkage and the beam dose has been ascertained, as well as the potential final shrinkage that could be encountered after prolonged exposure.
Bibliographic Reference: EUR 13332 EN (1991) 22 pp., MF, ECU 4, blow-up copy ECU 5
Record Number: 199110459 / Last updated on: 1994-12-02
Original language: en
Available languages: en