Mass spectroscopy is frequently used in plasma processes for partial pressure analysis to monitor the working gas or measure gaseous reaction products formed in the plasma or by the interaction between the plasma and other materials. Mass spectrometers essentially incorporate three functional elements: ion formation, mass separation and ion detection. Various techniques can be used to meet these requirements, and the most commonly used instrument is the quadrupole mass spectrometer. This spectrometer is described in detail. Other topics discussed include residual gas analysis and, in particular, its application during the conditioning of tokamak walls, and the direct measurement of plasma ions, with reference to energy selective plasma mass spectroscopy.
Bibliographic Reference: Extract: Proceedings of the 2nd Workshop on Plasma and Laser Technology, Cairo (1990) pp. 213-251
Availability: Forschungszentrum Jülich GmbH (KFA), Jülich (DE)
Record Number: 199110524 / Last updated on: 1994-12-02
Original language: en
Available languages: en