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  • The calibration of spectrometers for Auger electron and X-ray photoelectron spectrometers - Part I : An absolute traceable energy calibration for electron spectrometers

Abstract

In order to calibrate Auger electron spectrometers of various resolving powers, calibrated kinetic energy values for AES peaks have been determined. The effects of instrumental and operating parameters, including the spectrometer dispersion and stray magnetic fields, are assessed and contribute errors for three peaks not exceeding 0.06 eV and for two peaks not exceeding 0.03 eV. Calibrated positions in the direct spectrum are given for the Cu M(2,3)VV, Au N(6,7)VV, Ag M(4)NN, Cu L(3)VV and Au M(5)N(6,7)N(6,7) transitions at 0.2 eV resolution, referred to both the standard vacuum level and the Fermi level. For the derivative spectrum the positions of the negative excursions are established with the same accuracy. Data are tabulated for the above peaks in both the direct and differentiated modes for the resolutions of 0.15%, 0.3% and 0.6% produced by Gaussian broadening of the high resolution spectra. Differentiations are effected by both sinusoidal modulation and Savitzky-Golay functions of 2 eV and 5 eV peak-to-peak.

Additional information

Authors: SMITH G C, National Physical Laboratory, Division of Materials Applications, Teddington (GB);SEAH M P, National Physical Laboratory, Division of Materials Applications, Teddington (GB);ANTHONY M T, National Physical Laboratory, Division of Materials Applications, Teddington (GB)
Bibliographic Reference: EUR 13362 EN (1991) Vol. I, 104 pp., MF, ECU 8, blow-up copy ECU 13.75
Availability: (2)
Record Number: 199110591 / Last updated on: 1994-12-02
Category: PUBLICATION
Original language: en
Available languages: en