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  • The calibration of spectrometers for Auger electron and X-ray photoelectron spectrometers - Part II : The determination of the electron spectrometer transmission function and the detector sensitivity energy dependencies

Abstract

For the use of published general or theoretical sensitivity factors in quantitative AES and XPS the energy dependence of both the spectrometer transmission function and the detector sensitivity must be known. Simple procedures allow these dependencies to be determined experimentally. Detailed measurements for a modified VG Scientific ESCALAB II, the metrology spectrometer, operated in both the constant DeltaE/E and constant DeltaE modes, are presented and compared with theoretical estimates. It is shown that an exceptionally detailed electron-optical calculation, involving proprietary information, would be required to match the accuracy of the experimental procedures developed. Removal of the spectrometer transmission function and the detector sensitivity terms allows the measured spectrum to be converted to the true electron emission spectrum irrespective of the mode of operation. This provides the first step to the provision of reference samples to calibrate the transmission functions and detector sensitivities of all instruments.

Additional information

Authors: SMITH G C, National Physical Laboratory, Division of Materials Applications, Teddington (GB);SEAH M P, National Physical Laboratory, Division of Materials Applications, Teddington (GB)
Bibliographic Reference: EUR 13362 EN (1991) Vol. II, 94 pp., MF, ECU 4, blow-up copy ECU 12.50
Availability: (2)
Record Number: 199110592 / Last updated on: 1994-12-02
Category: PUBLICATION
Original language: en
Available languages: en