Elastic constants and hardness of ion-beam-sputtered TiN(x) films measured by Brillouin scattering and depth-sensing indentation
TiN(x) films of various composition were prepared by reactive-ion-beam sputtering at a deposition temperature of 50 C. Young's modulus E and hardness H of these films were measured by a depth-sensing nanoindentation technique, whereas the shear modulus G was obtained by a measurement of the velocity of the acoustic surface wave by Brillouin light scattering. The study was extended over a wide range of stoichiometries, with x ranging between 0 and 0.8. A proportionality between E and H was observed.
Bibliographic Reference: Article: Journal of Applied Physics, Vol. 69 (1991) No. 5, pp. 3053-3057
Record Number: 199110656 / Last updated on: 1994-12-02
Original language: en
Available languages: en