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Abstract

The sputtering of tungsten by carbon is investigated experimentally and by computer simulation. The erosion and deposition are studied as a function of the fluence of the incident carbon at 1 and 6 keV and for different angles of incidence. Both experimental data and computer simulation show a transition from net carbon deposition to net erosion as the angle of incidence exceeds values of 40 .

Additional information

Authors: ECKSTEIN W, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);ROTH J, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE)
Bibliographic Reference: Article: Nuclear Instruments and Methods in Physics Research, Vol. B53 (1991) pp. 279-284
Record Number: 199110781 / Last updated on: 1994-12-02
Category: PUBLICATION
Original language: en
Available languages: en
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