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Abstract

New sputtering mechanisms are identified by means of computer simulation with the MARLOWE code, which give rise to the most pronounced structures in the angular distributions of ejection from a (111) gold surface. The influence of surface scattering of ejected recoils and of the trajectory refraction by the surface binding forces is identified. This emphasises the relation between the structure of the sputtering angular patterns and the anisotropies in the distribution of the directions of motion of cascade atoms. Transient focussing processes in the cascade development are found to be responsible for the major structures in the sputtering angular distributions. These distributions are strongly dependent on the sputtering energy. It is suggested that this prediction can be checked by energy- and angular-resolved sputtering measurements.

Additional information

Authors: ECKSTEIN W, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);HOU M, Université Libre de Bruxelles, Bruxelles (BE)
Bibliographic Reference: Article: Nuclear Instruments and Methods in Physics Research, Vol. B53 (1991) pp. 270-278
Record Number: 199110783 / Last updated on: 1994-12-02
Category: PUBLICATION
Original language: en
Available languages: en