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Abstract

Contamination due to particles generated and suspended in silane RF plasmas is investigated. Powder is rendered visible by illumination of the reactor volume. This simple diagnostic for global, spatio-temporal powder dynamics is used to study particle formation, trapping and powder reduction by power modulation.

Additional information

Authors: HOWLING A A, Centre de Recherches en Physique des Plasmas, Ecole Polytechnique Fédérale de Lausanne, Lausanne (CH);HOLLENSTEIN C, Centre de Recherches en Physique des Plasmas, Ecole Polytechnique Fédérale de Lausanne, Lausanne (CH);PARIS P-J, Centre de Recherches en Physique des Plasmas, Ecole Polytechnique Fédérale de Lausanne, Lausanne (CH)
Bibliographic Reference: Report: LRP 427/91 EN (1991) 12 pp.
Availability: Available from Confédération Suisse, Centre de Recherches en Physique des Plasmas, Ecole Polytechnique Fédérale de Lausanne, 21 avenue des Bains, 1007 Lausanne (CH)
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