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Abstract

HTSC bolometers have been fabricated with a responsivity that is essentially wavelength independent in the wavelength range from approximately 0.6 microns to 450 microns. The bolometers consist of a thin film of YBaCuO on a SrTiO(3) substrate patterned by photolithography in the form of a micro-bridge (20 x 20 microns2). A maximum responsivity S of 0.1 V/W and an NEP of 2 x 1.0 E-7 W/(Hz)(1/2) were obtained when the element was operated near the transition temperature of 90 K. The frequency response varied as the inverse square root of (f), which indicates a strong thermal coupling of the micro-bolometer to the substrate. Higher responsivities (S = 800 V/W and an NEP of 2 x 1.0 E-11 W/(Hz)(1/2) were obtained using a second type of detector element, in the form of a meander covering an area of 1 mm2. For these elements a frequency response S = 1/f and a cut-off frequency of 0.1 Hz were found.

Additional information

Authors: DWIR B, Swiss Federal Institute of Technology (EPFL), Institut de Micro- et Optoelectronique (IMO), Lausanne (CH);DUDLE G, Swiss Federal Institute of Technology (EPFL), Institut de Micro- et Optoelectronique (IMO), Lausanne (CH);PAVUNA D, Swiss Federal Institute of Technology (EPFL), Institut de Micro- et Optoelectronique (IMO), Lausanne (CH);KELLETT B J, Ecole Polytechnique de Montreal, Départment Metallurgique, Montreal (CA);BEHN R, Centre de Recheches en Physique des Plasmas, Ecole Polytechnique Fédérale de Lausanne, Lausanne (CH)
Bibliographic Reference: Paper presented: 16th International Conference on Infrared and Millimeter Waves, Lausanne (CH), Aug. 26-30, 1991
Availability: Available from (1) as Paper EN 36310 ORA
Record Number: 199111111 / Last updated on: 1994-12-02
Category: PUBLICATION
Original language: en
Available languages: en