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Amorphous diamond-like carbon films were prepared in a dual ion beam by: (i) sputter deposition from a graphite target which accelerates Ar(+) ions from the primary ion source, with the secondary source using an Ar/H(2) mixture as the working gas; (ii) the same method but using methane as the working gas in the secondary ion source, and (iii) direct deposition using methane as the working gas in the primary source. Hardness and Young's modulus of the films were determined with a depth-sensing ultralow-load nanoindentation method. All films were characterised by FTIR absorption spectroscopy and analysed with respect to the concentration ratio of sp(3) to sp(2) bonds by a procedure proposed by Dischler. Films of highest sp(3)/sp(2) ratio (of approximately 3) were obtained by method (iii). Hardness and Young's modulus correlated with the measured sp(3)/sp(2) ratio. With method (i) comparably hard and sp(3) rich films were obtained only with relatively intense assisting beams but with correspondingly low deposition rates. Method (ii), which can be considered as a combination of the other two methods, was found to give a high deposition rate and combined hard and sp(3) rich films. The films are chemically stable up to 450 C.

Additional information

Authors: DUNLOP E, JRC Ispra (IT);HAUPT J, JRC Ispra (IT);GISSLER W, JRC Ispra (IT)
Bibliographic Reference: Paper presented: 12th European Conference on Diamond and Diamond-like Carbon Coatings, Nice (FR), Sept. 2-6, 1991
Availability: Available from (1) as Paper EN 36282 ORA
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