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Rutherford backscattering spectrometry (RBS) is an ion beam based analytical technique giving information on the atomic composition profile of the near surface region of materials. As the physical processes involved in this technique are very well understood, computer codes have been developed providing simple and efficient means of performing quantitative RBS analysis. Nevertheless, the attainable accuracy in the measurements is limited by the uncertainty in the currently known stopping power values of materials for alpha-particles of MeV energy. Evidence is given of the inaccuracies of the tabulated stopping powers in the computer code RUMP for the matrix element Si by direct use of Harwell II standard samples in a RBS experiment. It is shown how these inaccuracies can affect the interpretation of the results in a RBS analysis of a high dose implant of Cr in Si.

Additional information

Authors: CLIMENT-FONT A, Universidad Autónoma Madrid, Departamento de Física, Madrid (ES);WÄTJEN U, JRC Geel (BE);BAX H, JRC Geel (BE)
Bibliographic Reference: Paper presented: 10th International Conference on Ion Beam Analysis, Eindhoven (NL), July 1-5, 1991
Availability: Available from (1) as Paper EN 36301 ORA
Record Number: 199111122 / Last updated on: 1994-12-02
Original language: en
Available languages: en