The CBNM scanning nuclear microprobe for materials analysis
This paper gives a brief description of the scanning nuclear microprobe instrument at the Central Bureau for Nuclear Measurements (CBNM) in Geel, emphasising the facilities for materials analysis. A 2.5 x 2.5 square micron proton beam is routinely achieved by a new focussing procedure utilising the grid shadow method. Particle induced X-ray emission (PIXE), Rutherford backscattering spectroscopy (RBS) and the detection of secondary electrons are implemented. A software package has been developed to facilitate rapid analysis on-line as well as off-line. Among other applications, the CBNM microprobe is used for materials analysis. A custom-built, large solid angle, implanted silicon detector has been included for high efficiency RBS analysis. Examples of the usefulness of the microprobe facility for materials research are given.
Bibliographic Reference: Paper presented: 10th International Conference on Ion Beam Analysis, Eindhoven (NL), July 1-5, 1991
Availability: Available from (1) as Paper EN 36016 ORA
Record Number: 199111229 / Last updated on: 1994-12-02
Original language: en
Available languages: en