Angular distributions of sputtered carbon at oblique ion incidence on graphite targets
Angular distributions of sputtered particles were studied simultaneously and independently by experiments and computer simulation for the case of 30 keV argon ion bombardment of graphite, at different angles of primary-ion incidence. The discrepancies between the experimental and simulated results are discussed.
Bibliographic Reference: Article: Nuclear Instruments and Methods in Physics Research B, Vol. 61 (1991) pp. 12-20
Record Number: 199111312 / Last updated on: 1994-12-02
Original language: en
Available languages: en