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Abstract

A technique is presented which greatly facilitates the focussing of nuclear microprobe ion beams down to sizes of about one micrometer. It is based on the visual observation of the pattern created by the ion beam when impinging on a scintillating screen, after first having passed through a 2000 mesh copper grid placed in the image plane. No additional electronic components or detectors are required. Apart from aiding the user in the focussing of the beam, the generated patterns provide information on the quality of the ion beam focussing system.

Additional information

Authors: SWIETLICKI E, JRC Geel (BE);LÖVESTAM N E G, JRC Geel (BE);WÄTJEN U, JRC Geel (BE)
Bibliographic Reference: Article: Nuclear Instruments and Methods in Physics Research B, Vol. 61 (1991) pp. 230-235
Record Number: 199111317 / Last updated on: 1994-12-02
Category: PUBLICATION
Original language: en
Available languages: en