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Abstract

Rutherford backscattering in channelling combined with elastic recoil detection analysis has been used to study the formation and destruction of hydrogen "supermolecular" complexes (H(2)), formed in single crystal silicon after hydrogen implantation and annealing in the range 150-800 C. Secondary ion mass spectroscopy has been used to confirm this interpretation by giving direct evidence for H(2). The supermolecular configuration can be interpreted as the nucleus for the formation of bubbles.

Additional information

Authors: MEDA L, Istituto Guido Donegani, S. Donato, Milano (IT);CEROFOLINI G F, Istituto Guido Donegani, S. Donato, Milano (IT);OTTAVIANI G ET AL., Università di Modena, Modena (IT);ANDERLE M, IRST, Divisione Scienza dei Materiali, Trento (IT);CANTERI R, IRST, Divisione Scienza dei Materiali, Trento (IT);DIERCKX R, JRC Ispra (IT)
Bibliographic Reference: Paper presented: International Centre for Theoretical Physics, Trieste (IT), Aug. 27-31, 1990
Availability: Available from (1) as Paper EN 35401 ORA
Record Number: 199111327 / Last updated on: 1994-12-02
Category: PUBLICATION
Original language: en
Available languages: en