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Abstract

The potential of thin reference layers prepared by the Central Bureau for Nuclear Measurements (CBNM) for calibration purposes in surface analysis is presented. The special preparation procedure is outlined. It uses an ultrahigh vacuum microbalance with the substitution principle of weighing applied. The procedure of characterising the areal density of the evaporated layers provides optimal traceability to the SI unit of mass. In addition to thin metal layers evaporated onto vitreous carbon substrates, which can be used for yield calibration as well as for energy calibration, the CBNM is making use of thin layers as internal standards on implanted samples, in order to perform high-accuracy determinations of the retained dose through Rutherford Backscattering Spectrometry (RBS). In turn, these implants are made available as reference samples.

Additional information

Authors: WÄTJEN U, JRC Geel (BE);BAX H, JRC Geel (BE);RIETVELD P, JRC Geel (BE)
Bibliographic Reference: Paper presented: ECASIA 91, 4th European Conference on Application of Surface and Interface Analysis, Budapest (HU), Oct. 14-18, 1991
Availability: Available from (1) as Paper EN 36388 ORA
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