Angular, energy, and mass distribution of sputtered particles
The particles sputtered from a solid surface during particle bombardment are mostly neutral atoms emitted with an angular distribution that can be more peaked or broader than a cosine distribution. For single crystals, emission peaks are found in close-packed crystal directions. These emission distributions are influenced by the surface topography that develops during sputtering, by correlated collision sequences in the spread of the collision cascade in single crystals, and by the last collisions close to the surface where the atoms are sputtered. The sputtered atoms have a broad energy distribution that peaks at a few eV, about half the surface binding energy. A small fraction of the sputtered particles are clusters containing up to 15 atoms or more. For spike conditions a fraction of the sputtered atoms have thermal (a few thousand Kelvin) energies, but also larger clusters containing up to some 1000 atoms are released. On rough, partly oxidised, surfaces microparticles (chunks) with up to 1.0 E12 atoms are emitted.
Bibliographic Reference: Article: Topics in Applied Physics, Vol. 64 (1991) pp. 15-90
Record Number: 199210126 / Last updated on: 1994-12-02
Original language: en
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