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Modern electron microscopy is capable of high spatial resolution analysis (nanoanalysis). After an explanation of the electronic requirements, and description of the possible results that can be determined by this method, the article reports on the profiling of cross-sections prepared from special Al/Si contacts and the analysis of small defects in unirradiated and alpha-bombarded Cr-Mn steels. These are mainly performed using EDS (X-ray energy dispersive spectroscopy) and EELS (electron energy loss spectroscopy). In particular, the article considers Al/TiN contacts on silicon, steels for fusion reactors, precipitates in non-irradiated steels, dislocation loops and precipitates in alpha-irradiated steels and cavities filled with He in alpha-implanted steels.

Additional information

Authors: VALDRE G, University of Bologna (IT);VALDRE U, University of Bologna (IT);RUEDL E, JRC Ispra (IT)
Bibliographic Reference: Article: Philips Electron Optics Bulletin, Vol. 130 (1991) pp. 45-52
Record Number: 199210205 / Last updated on: 1994-12-02
Original language: en
Available languages: en