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The surface reaction of thermal atomic hydrogen with amorphous carbon films (a-C:H), with boron containing carbon films (a-C/B:H) and with diamond films, leads to the formation of hydrocarbons. In the case of a-C/B:H, BH(2) is formed in addition to the hydrocarbons. When compared with a-C:H films, the reaction yield with an a-C/B:H film is significantly reduced and that with diamond films is orders of magnitude smaller.

Additional information

Authors: VIETZKE E ET AL., Institut für Plasmaphysik, Kernforschungsanlage Jülich GmbH, Jülich (DE);VEPREK S, Technische Universität München, Institut für Chemie der Informationsaufzeichnung (DE);KOIDL P, Fraunhofer Institut für Angewandte Festkörperphysik, Freiburg (DE)
Bibliographic Reference: Article: Proceedings of the 10th International Symposium on Plasma Chemistry, Vol. 3 (1991) 3.1-1, pp. 1-5
Record Number: 199210241 / Last updated on: 1994-12-02
Original language: en
Available languages: en