Sputtering of amorphous C:H and C/B:H layers by energetic Ar-ions
Amorphous C:H and C/B:H layers have been sputtered by a pulsed 1.5 keV argon ion source, and the velocity distribution of the sputtered H, C and B-atoms has been determined by laser induced fluorescence. Thomson distributions have been fitted to these curves giving surface energies of about 0.8 eV for H, 7.6 eV for C and 5.6 eV for B-atoms. Strong effects of the dose on the sputtering yield have been found for H-atoms.
Bibliographic Reference: Article: Proceedings of the 10th International Symposium on Plasma Chemistry, Vol. 3 (1991) 3.1-18, pp. 1-6
Record Number: 199210245 / Last updated on: 1994-12-02
Original language: en
Available languages: en