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Abstract

Amorphous C:H and C/B:H layers have been sputtered by a pulsed 1.5 keV argon ion source, and the velocity distribution of the sputtered H, C and B-atoms has been determined by laser induced fluorescence. Thomson distributions have been fitted to these curves giving surface energies of about 0.8 eV for H, 7.6 eV for C and 5.6 eV for B-atoms. Strong effects of the dose on the sputtering yield have been found for H-atoms.

Additional information

Authors: PASCH E, Universität-GHS Essen (DE);BOGEN P, Institut für Plasmaphysik, Kernforschungsanlage Jülich GmbH, Jülich (DE);MERTENS P, Institut für Plasmaphysik, Kernforschungsanlage Jülich GmbH, Jülich (DE)
Bibliographic Reference: Article: Proceedings of the 10th International Symposium on Plasma Chemistry, Vol. 3 (1991) 3.1-18, pp. 1-6
Record Number: 199210245 / Last updated on: 1994-12-02
Category: PUBLICATION
Original language: en
Available languages: en