Determination of electron density distributions in a microwave produced plasma by FIR interferometry
Accurate local measurements of electron densities in reactive discharges using FIR interferometry are possible down to a density of 1.0 E16/m3. Determination of the distribution of atomic or molecular species by means of absolute line intensity emission measurements to derive T(e) has proven to be difficult, even if extended collisional radiative models are used and electron densities are adapted from experiments.
Bibliographic Reference: Article: Proceedings of the 20th International Conference on Phenomena in Ionized Gases, Contributed Papers 1 (1991) pp. 293-294
Record Number: 199210266 / Last updated on: 1994-12-02
Original language: en
Available languages: en