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The modification of the mechanical properties and microstructure of Si(3)N(4) ceramics induced by the irradiation with Si(+) ions has been investigated as a function of the ion fluence (1.0 E14 to E17/cm2) and the ion energy (0.5-1 MeV). The mechanical properties have been studied by evaluating the changes in microhardness, indentation fracture toughness and flexural strength distribution, while the microstructure was determined using cross-section transmission microscopy (XTEM). The mechanisms underlying the ion beam modifications of the ceramics are discussed.

Additional information

Authors: BOLSE W, JRC Petten (NL);PETEVES S D, JRC Petten (NL);SARIS F W, FOM-Institute for Atomic and Molecular Physics, Amsterdam (NL)
Bibliographic Reference: Paper presented: 2nd European Ceramic Society Conference, Augsburg (DE), Sept. 11-14, 1991
Availability: Available from (1) as Paper EN 36606 ORA
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