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Carbon is bombarded by 5 keV He, Ne, Ar, and Kr at an oblique angle of incidence (65 and 70 to the surface normal). The energy distribution of backscattered and sputtered ions are measured and calculated with the simulation program TRSPTEST. The sputtered carbon recoils appear as positive as well as negative ions, whereas negative backscattered noble gas ions are not observed. The negative fraction of the sputtered carbon is up to about an order of magnitude larger than the positive fraction. The calculated results show a good qualitative agreement with the experimental data.

Additional information

Authors: ECKSTEIN W, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);MASHKOVA E S, Moscow State University (SU)
Bibliographic Reference: Article: Nuclear Instruments and Methods in Physics Research B, Vol. 62 (1992) pp. 438-446
Record Number: 199210482 / Last updated on: 1994-12-02
Original language: en
Available languages: en