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Glancing angle X-ray diffraction and microhardness measurements using the nanoindentation technique have been made on both Ti ion implanted BN films and Ti/BN multilayers mixed by Ar ion bombardment. In both cases a phase formation is observed, with the appearance of face centred cubic TiN-like nanocrystalline structures of comparable hardness. The hardness values peak in both cases at just above 10 GPa, somewhat softer than pure TiN.

Additional information

Authors: GIBSON P N, JRC Ispra (IT);GISSLER W, JRC Ispra (IT);HAUPT J, JRC Ispra (IT);FRIESEN T, JRC Ispra (IT);FALCONE R, CNRSM, Mesagne (IT)
Bibliographic Reference: Paper presented: 11th International Conference on Vacuum Metallurgy, Antibes (FR), May 11-14, 1992
Availability: Available from (1) as Paper EN 36812 ORA
Record Number: 199210712 / Last updated on: 1994-12-02
Original language: en
Available languages: en