The CBNM scanning nuclear microbe for materials analysis
This paper gives a brief description of the scanning nuclear microprobe instrument at the CBNM in Geel, emphasising the facilities for materials analysis. A 2.5 x 2.5 micron2 proton beam is achieved routinely using a new focusing procedure utilising the grid shadow method. Both particle-induced X-ray emission (PIXE) and Rutherford backscattering spectroscopy (RBS), as well as the detection of secondary electrons, are implemented. An easy-to-use computer system and a comprehensive software package has been developed to facilitate user-friendly and rapid on-line as well as off-line analysis. A custom-built, large solid angle, implanted silicon detector has been included for high-efficiency RBS analysis. Examples of the usefulness of the microprobe facility for materials research are given.
Bibliographic Reference: Article: Nuclear Instruments and Methods in Physics Research B, Vol. 64 (1992) pp. 371-374
Record Number: 199210747 / Last updated on: 1994-12-02
Original language: en
Available languages: en