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This paper gives a brief description of the scanning nuclear microprobe instrument at the CBNM in Geel, emphasising the facilities for materials analysis. A 2.5 x 2.5 micron2 proton beam is achieved routinely using a new focusing procedure utilising the grid shadow method. Both particle-induced X-ray emission (PIXE) and Rutherford backscattering spectroscopy (RBS), as well as the detection of secondary electrons, are implemented. An easy-to-use computer system and a comprehensive software package has been developed to facilitate user-friendly and rapid on-line as well as off-line analysis. A custom-built, large solid angle, implanted silicon detector has been included for high-efficiency RBS analysis. Examples of the usefulness of the microprobe facility for materials research are given.

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Authors: LÖVESTAM N E G ET AL., JRC Geel (BE)
Bibliographic Reference: Article: Nuclear Instruments and Methods in Physics Research B, Vol. 64 (1992) pp. 371-374
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