Barrier-discharges for plasma-assisted surface treatment
This thesis deals with a fundamental investigation of barrier-discharges, with a view to using this kind of gas discharge for surface treatment. As an introduction, the characteristic properties of barrier-discharges are outlined, but interest centres on the microdischarges which make up the barrier-discharges. Experimental and measuring equipment used in this investigation is described. The time- and space-dependent behaviour of barrier-discharges was studied, and the type and pressure of the gas, the geometric arrangement and the supplied voltage were varied in order to achieve a uniform distribution of the microdischarges. In the characterisation of discharges, emphasis was placed on their current and voltage shapes. Discharge conditions suitable for the treatment of surfaces are discussed. Further investigations aim to demonstrate the deposition of hydrocarbon thin films on glass substrates. There is a description of the process characteristics leading to a film of high quality and a discussion of the influence of the discharge characteristics on the film properties.
Bibliographic Reference: Report: Jül-2613 DE (1992) 128 pp.
Availability: Available from Zentralbibliothek der Kernforschungsanlage Jülich GmbH, Postfach 1913, 5170 Jülich (DE)
Record Number: 199211069 / Last updated on: 1994-11-29
Original language: de
Available languages: de