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Abstract

Glow discharges are used in many ways to alter the surfaces of materials. The energetic properties of the ions and neutral particles involved and their species compositions on the surface to be treated are significant factors in these processes. A major aim of this project was to study a number of important relationships between the characteristics of plasma, which greatly influence the surface, and discharge parameters that can be adjusted externally, with the aim of optimising the processes occurring on the surface. As well as identifying ion and neutral particle energy spectra on the substrate surface and their absolute particle flow, it is important to understand the more general electrical characteristics of a glow discharge, such as plasma potential, cathode fall, degree of ionisation, and electron temperature. For this purpose, model-based descriptions are employed. They are carried out initially on simple inert gas plasmas (He, Ar) and then on more complicated molecule plasmas (H(2),CH(4)), which are used, amongst other things, for the conditioning and surfacing of fusion equipment.

Additional information

Authors: ROSE T, Forschungszentrum Jülich GmbH, Institut für Plasmaphysik (DE)
Bibliographic Reference: Report: Jül-2662 DE (1992) 141 pp.
Availability: Available from Zentralbibliothek der Forschungszentrum Jülich GmbH, Postfach 1913, 5170 Jülich (DE)
Record Number: 199211269 / Last updated on: 1994-11-29
Category: PUBLICATION
Original language: de
Available languages: de